FRT Metrology manufactures 3D surface measurement technology for research and production. Our high-precision measuring instruments are based on SurfaceSens™ multi-sensor concept and are equipped with in-house developed software. The multiple award-winning measuring systems provide (also fully automatically) information about topography, step height, roughness, layer thickness and many other parameters, contact-free and non-destructive. Depending on the application, different measuring methods can be combined with point, line, area and layer thickness sensors and atomic force microscopy in one measuring instrument - measuring ranges can vary from meters to sub-nanometers. The FRT MicroProf® is well established in semiconductor front end, advanced packaging, MEMS, VCSEL, automotive, engineering and optics.