Semicorex Advanced Material Technology

Semicorex Advanced Material Technology Co., Ltd is a leading high-quality supplier of top-notch chemical vapor deposition (CVD) SiC coating products in China. We are committed to the research and development of innovative semiconductor materials, particularly SiC coating technology and its application in the semiconductor industry. We offer a wide range of high-quality products such as SiC-coated graphite susceptors, silicon carbide coated, deep UV epitaxy susceptors, CVD substrate heaters, CVD SiC wafer carriers, wafer boats, as well as semiconductor components and silicon carbide ceramic products. At Semicorex, we utilize CVD to manufacture dense β-SiC films on high-strength isostatic graphite, which has higher purity compared to sintered SiC materials. Our products such as SiC-coated graphite susceptors endow the graphite base with special properties, making the surface of graphite base compact, smooth and non-porous, superior heat resistant, thermal uniformity, corrosion resistant and oxidation resistant. SiC coating technology has gained widespread use particularly in LED epitaxial carriers’ growth and Si single crystal epitaxy. With the rapid growth of the semiconductor industry, the demand for SiC coating technology and products has increased significantly. Our SiC coating products have a wide range of applications in the aerospace, photovoltaic industry, nuclear energy, high-speed rail, automotive, and other industries. Product Applications: LED IC epitaxy Single-crystal silicon epitaxy RTP/TRA wafer carriers ICP/PSS etching Plasma etching SiC epitaxy Monocrystalline silicon epitaxy Silicon-base GaN epitaxy Deep UV epitaxy semiconductor etching photovoltaic industry SiC Epitaxial CVD system SiC epitaxial film growth equipment MOCVD reactor MOCVD system CVD equipment PECVD systems LPE systems Aixtron systems Nuflare systems TEL CVD systems Vecco systems TSI systems